Patent Assignment
Reel/Frame 036726/0652
Assignment of Assignor's Interest
Recorded: 2015-10-05
Pages: 6
Assignors
TRAUTZSCH, THOMAS
Executed: 2015-09-08
BUTTGEREIT, UTE
Executed: 2015-09-23
THALER, THOMAS
Executed: 2015-09-18
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method and device for examining a mask
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.