Patent Assignment
Reel/Frame 036731/0179
Assignment of Assignor's Interest
Recorded: 2015-10-05
Pages: 5
Assignors
HO, IRENE
Executed: 2015-05-13
HUNG, AI-JEN
Executed: 2015-05-18
HSIEH, HUNG-CHANG
Executed: 2015-05-21
LU, KUEI-LIANG
Executed: 2015-05-22
CHANG, YA-HUI
Executed: 2015-05-21
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6,, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method of Lithography Process with Inserting Scattering Bars