Patent Assignment
Reel/Frame 036738/0284
Assignment of Assignor's Interest
Recorded: 2015-10-06
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Forming a Semiconductor Device Comprising Titanium Silicon Oxynitride