Patent Assignment
Reel/Frame 036767/0017
Assignment of Assignor's Interest
Recorded: 2015-10-09
Pages: 5
Assignor
HIROKI, TSUTOMU
Executed: 2015-10-05
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Temperature Control System and Temperature Control Method