Patent Assignment
Reel/Frame 036770/0447
Assignment of Assignor's Interest
Recorded: 2015-10-12
Pages: 6
Assignor
RANGANATHAN, EASHWAR
Executed: 2015-08-04
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Vapor Delivery in a Substrate Processing System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.