Patent Assignment
Reel/Frame 036788/0956
Assignment of Assignor's Interest
Recorded: 2015-10-14
Pages: 3
Assignor
HULI, LIOR
Executed: 2015-10-13
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Euv Resist Etch Durability Improvement and Pattern Collapse Mitigation