Patent Assignment
Reel/Frame 036818/0541
Assignment of Assignor's Interest
Recorded: 2015-10-08
Pages: 3
Assignors
USUI, TATEHITO
Executed: 2015-07-31
HIROTA, KOSA
Executed: 2015-08-03
INOUE, SATOMI
Executed: 2015-08-03
NAKAMOTO, SHIGERU
Executed: 2015-07-31
FUKUCHI, KOUSUKE
Executed: 2015-08-03
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.