Patent Assignment
Reel/Frame 036821/0170
Assignment of Assignor's Interest
Recorded: 2015-10-19
Pages: 5
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Patterning Process and Chemically Amplified Negative Resist Composition