Patent Assignment
Reel/Frame 036848/0865
Assignment of Assignor's Interest
Recorded: 2015-10-21
Pages: 4
Assignors
NAKATANI, KIMIHIKO
Executed: 2014-10-07
HARADA, KAZUHIRO
Executed: 2014-10-10
ASHIHARA, HIROSHI
Executed: 2014-10-07
YAMAMOTO, RYUJI
Executed: 2014-10-14
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.