Patent Assignment
Reel/Frame 036850/0572
Assignment of Assignor's Interest
Recorded: 2015-10-21
Pages: 3
Assignors
MATYUSHKIN, ALEXANDER
Executed: 2015-10-09
MARAKHTANOV, ALEXEI
Executed: 2015-10-09
HOLLAND, JOHN PATRICK
Executed: 2015-10-13
GAFF, KEITH
Executed: 2015-10-19
KOZAKEVICH, FELIX
Executed: 2015-10-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Electrostatic Chuck Design for Cooling-Gas Light-Up Prevention