Patent Assignment
Reel/Frame 036850/0685
Assignment of Assignor's Interest
Recorded: 2015-10-21
Pages: 3
Assignor
YAMAMOTO, TAKAHIRO
Executed: 2015-08-03
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Measurement Apparatus and Method That Measure Shape of Surface While Canceling Cyclical Errors to Zero by Summing of Cyclic Errors Having Different Phases