Patent Assignment
Reel/Frame 036855/0044
Assignment of Assignor's Interest
Recorded: 2015-10-22
Pages: 4
Assignors
SASAGAWA, NORIHIKO
Executed: 2015-09-10
INADA, HIROICHI
Executed: 2015-09-11
TAKIGUCHI, YASUSHI
Executed: 2015-09-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Method and Storage Medium