Patent Assignment
Reel/Frame 036864/0654
Assignment of Assignor's Interest
Recorded: 2015-10-23
Pages: 4
Assignor
OKUNISHI, NAOHIKO
Executed: 2015-10-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Filter Unit