Patent Assignment
Reel/Frame 036880/0849
Assignment of Assignor's Interest
Recorded: 2015-10-26
Pages: 6
Assignors
IWASAKI, MASAHIDE
Executed: 2015-10-15
NOZAWA, TOSHIHISA
Executed: 2015-10-15
YAMASHITA, KOHEI
Executed: 2015-10-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Film Forming Apparatus and Shower Head