Patent Assignment
Reel/Frame 036887/0176
Assignment of Assignor's Interest
Recorded: 2015-10-19
Pages: 4
Assignors
SHANG, YAO-YUAN
Executed: 2015-07-08
TSENG, KUO-SHU
Executed: 2015-07-08
YANG, CHUNE-TE
Executed: 2015-07-08
CHAN, CHI-HSIN
Executed: 2015-07-08
CHEN, CHUNG-JHIEH
Executed: 2015-07-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method and System for Positioning Wafer in Semiconductor Manufacturing Fabrication