Patent Assignment
Reel/Frame 036899/0064
Assignment of Assignor's Interest
Recorded: 2015-10-28
Pages: 3
Assignors
CHEN, OTTO
Executed: 2015-10-13
WU, CHI-YING
Executed: 2015-10-13
CHEN, CHIA-CHIH
Executed: 2015-10-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8 LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Ion Collector for Use in Plasma Systems