Patent Assignment
Reel/Frame 036903/0814
Assignment of Assignor's Interest
Recorded: 2015-10-28
Pages: 10
Assignors
SEKIMOTO, MASAHIKO
Executed: 2015-10-15
YOKOYAMA, TOSHIO
Executed: 2015-10-15
KOBAYASHI, KENICHI
Executed: 2015-10-15
AKAZAWA, KENICHI
Executed: 2015-10-15
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Rinsing Bath and Substrate Cleaning Method Using Such Rinsing Bath