Patent Assignment
Reel/Frame 036903/0876
Assignment of Assignor's Interest
Recorded: 2015-10-28
Pages: 3
Assignor
SUMITANI, KOICHI
Executed: 2015-07-13
Assignee
MITSUBISHI ELECTRIC CORPORATION
7-3, MARUNOUCHI 2-CHOME, CHIYODA-KU, TOKYO, 100-8310, JAPAN
Covered Property
(1)
Vacuum Apparatus and Method for Manufacturing Semiconductor Device