Patent Assignment
Reel/Frame 036926/0211
Assignment of Assignor's Interest
Recorded: 2015-10-30
Pages: 7
Assignors
CHUANG, HARRY-HAK-LAY
Executed: 2015-10-10
WANG, YU-HSIUNG
Executed: 2015-10-07
LIU, CHEN-CHIN
Executed: 2015-10-07
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method for Manufacturing a Finger Trench Capacitor with a Split-Gate Flash Memory Cell