Patent Assignment
Reel/Frame 036932/0538
Assignment of Assignor's Interest
Recorded: 2015-11-02
Pages: 6
Assignors
OKAFUJI, DAIYU
Executed: 2015-10-14
YAMAZAKI, HIROYUKI
Executed: 2015-10-14
ANDO, MASAO
Executed: 2015-10-14
TAKEUCHI, MASAKI
Executed: 2015-10-14
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Rectangular Substrate for Imprint Lithography and Making Method