Patent Assignment
Reel/Frame 036939/0113
Assignment of Assignor's Interest
Recorded: 2015-11-02
Pages: 3
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Critical Dimension Uniformity Enhancement Techniques and Apparatus
mCDU Enhancements
Application:
62/066,873 →