Patent Assignment
Reel/Frame 036942/0247
Assignment of Assignor's Interest
Recorded: 2015-11-03
Pages: 8
Assignors
MORIYA, ATSUSHI
Executed: 2015-10-29
NAKAISO, NAOHARU
Executed: 2015-10-29
ORIHASHI, YUGO
Executed: 2015-10-29
MURAKAMI, KOTARO
Executed: 2015-10-29
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Gas Supply System, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.