Patent Assignment
Reel/Frame 036945/0687
Assignment of Assignor's Interest
Recorded: 2015-11-03
Pages: 4
Assignors
KUMAR, PURUSHOTTAM
Executed: 2015-10-29
LAVOIE, ADRIEN
Executed: 2015-10-29
QIAN, JUN
Executed: 2015-10-29
KANG, HU
Executed: 2015-10-29
KARIM, ISHTAK
Executed: 2015-10-29
OU, FUNG SUONG
Executed: 2015-10-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Dynamic Precursor Dosing for Atomic Layer Deposition