Patent Assignment
Reel/Frame 036970/0547
Assignment of Assignor's Interest
Recorded: 2015-11-05
Pages: 6
Assignors
ZHANG, FANG
Executed: 2015-01-23
ZHU, JING
Executed: 2015-01-23
HUANG, HUIJIE
Executed: 2015-01-23
SONG, QIANG
Executed: 2015-01-23
YANG, BAOXI
Executed: 2015-01-23
CHEN, MING
Executed: 2015-01-23
ZENG, AIJUN
Executed: 2015-01-23
HUANG, LIHUA
Executed: 2015-01-23
HU, ZHONGHUA
Executed: 2015-01-23
XIAO, YANFEN
Executed: 2015-01-23
Assignee
SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS CHINESE ACADEMY OF SCIENCES
390 QINGHE TOAD, JIADING DISTRICT, SHANGHAI, 201800, CHINA
Covered Property
(1)
Lithography Pupil Shaping Optical System and Method for Generating Off-Axis Illumination Mode