Patent Assignment
Reel/Frame 036974/0360
Assignment of Assignor's Interest
Recorded: 2015-11-05
Pages: 8
Assignors
ADEL, MICHAEL
Executed: 2015-09-29
MIEHER, WALTER D.
Executed: 2015-09-21
GHINOVKER, MARK
Executed: 2015-10-08
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Apparatus and Methods for Detecting Overlay Errors Using Scatterometry