Patent Assignment
Reel/Frame 036992/0924
Assignment of Assignor's Interest
Recorded: 2015-11-09
Pages: 7
Assignors
BEZEL, ILYA
Executed: 2014-10-09
SHCHEMELININ, ANATOLY
Executed: 2014-08-12
DERSTINE, MATTHEW
Executed: 2014-10-09
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method and System for Controlling Convection Within a Plasma Cell