Patent Assignment
Reel/Frame 037003/0118
Assignment of Assignor's Interest
Recorded: 2015-11-10
Pages: 7
Assignors
KATO, HITOSHI
Executed: 2015-10-23
MIURA, SHIGEHIRO
Executed: 2015-10-23
KIKUCHI, HIROYUKI
Executed: 2015-10-23
AIKAWA, KATSUYOSHI
Executed: 2015-10-30
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Apparatus