Patent Assignment
Reel/Frame 037018/0580
Assignment of Assignor's Interest
Recorded: 2015-10-30
Pages: 3
Assignee
SK HYNIX INC.
2091, GYEONGCHUNG-DAERO, BUBAL-EUB, GYEONGGI-DO, ICHEON, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus and Method for Removing Particles Present on a Wafer Using Photoelectrons and an Electric Field