Patent Assignment
Reel/Frame 037034/0066
Assignment of Assignor's Interest
Recorded: 2015-11-13
Pages: 3
Assignors
BOZKURT, MURAT
Executed: 2014-09-24
JAK, MARTIN JACOBUS JOHAN
Executed: 2014-09-24
TINNEMANS, PATRICIUS ALOYSIUS JACOBUS
Executed: 2014-09-25
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method of Measuring a Property of a Target Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method