Patent Assignment
Reel/Frame 037049/0977
Assignment of Assignor's Interest
Recorded: 2015-11-16
Pages: 2
Assignor
YASHIMA, JUN
Executed: 2015-11-09
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, JAPAN
Covered Property
(1)
Method of Generating Write Data for Energy Beam Writing Apparatus, Method of Writing with Energy Beam, and Energy Beam Writing Apparatus