Patent Assignment
Reel/Frame 037086/0653
Assignment of Assignor's Interest
Recorded: 2015-11-19
Pages: 5
Assignors
KOBAYASHI, YOSHIYUKI
Executed: 2015-10-23
WATANABE, JUN
Executed: 2015-11-02
OKADA, TAKUYA
Executed: 2015-11-02
NARA, TOMOYUKI
Executed: 2015-11-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus