Patent Assignment
Reel/Frame 037103/0337
Assignment of Assignor's Interest
Recorded: 2015-11-20
Pages: 3
Assignors
NAKATANI, KIMIHIKO
Executed: 2015-11-10
HARADA, KAZUHIRO
Executed: 2015-11-10
KITAMURA, MASAHITO
Executed: 2015-11-10
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA, 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.