Patent Assignment
Reel/Frame 037128/0287
Assignment of Assignor's Interest
Recorded: 2015-11-24
Pages: 4
Assignors
AMANO, YOSHIFUMI
Executed: 2015-11-20
ITO, YUKI
Executed: 2015-11-20
OKAMOTO, EIICHIRO
Executed: 2015-11-20
IWANAGA, KAZUYA
Executed: 2015-11-20
IKEBE, RYOJI
Executed: 2015-11-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Measurement Processing Device, Substrate Processing System, Measurement Jig, Measurement Processing Method, and Storage Medium