Patent Assignment
Reel/Frame 037133/0420
Assignment of Assignor's Interest
Recorded: 2015-11-24
Pages: 7
Assignors
AMIT, ERAN
Executed: 2015-03-26
LOEVSKY, BARRY
Executed: 2015-05-29
VOLKOVICH, ROIE
Executed: 2015-03-26
MANASSEN, AMNON
Executed: 2015-08-03
HILL, ANDREW
Executed: 2015-03-29
AMIR, NURIEL
Executed: 2015-06-04
LEVINSKI, VLADIMIR
Executed: 2015-02-26
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Polarization Measurements of Metrology Targets and Corresponding Target Designs