Patent Assignment
Reel/Frame 037134/0438
Assignment of Assignor's Interest
Recorded: 2015-11-24
Pages: 3
Assignor
PATRA, MICHAEL
Executed: 2015-11-19
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
System for Producing Structures in a Substrate