Patent Assignment
Reel/Frame 037144/0734
Assignment of Assignor's Interest
Recorded: 2015-11-25
Pages: 6
Assignors
HSU, WEI-CHIH
Executed: 2015-10-14
CHUANG, KAI-LIN
Executed: 2015-10-16
CHIEN, YUAN-CHI
Executed: 2015-10-14
YANG, JENG-HUEI
Executed: 2015-10-21
LIU, JUN-XIU
Executed: 2015-11-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Apparatus of Processing Semiconductor Substrate