Patent Assignment
Reel/Frame 037148/0778
Assignment of Assignor's Interest
Recorded: 2015-11-27
Pages: 4
Assignor
HARA, HIDEAKI
Executed: 2015-09-04
Assignee
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Carrier System, Exposure Apparatus, Carrier Method, Exposure Method, Device Manufacturing Method, and Suction Device