Patent Assignment
Reel/Frame 037155/0529
Assignment of Assignor's Interest
Recorded: 2015-11-24
Pages: 3
Assignors
KOERNER, KLAUS
Executed: 2015-11-16
ROESELER, ARNULF
Executed: 2015-11-18
CLAUS, DANIEL
Executed: 2015-11-19
OSTEN, WOLFGANG
Executed: 2015-11-19
Assignee
UNIVERSITÄT STUTTGART
KEPLERSTRASSE 7, STUTTGART, 70174, GERMANY
Covered Property
(1)
Apparatus and a method for spectroscopic ellipsometry, in particular infrared spectroscopic ellipsometry