Patent Assignment
Reel/Frame 037156/0587
Modifying Conversion
Recorded: 2015-11-24
Pages: 6
Assignor
CARL ZEISS SMT AG
Executed: 2010-10-14
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Operating an Illumination System of a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.