Assignment of Assignor's Interest

Recorded: 2015-11-30 Pages: 4

Assignors

HEMBACHER, STEFAN

Executed: 2007-08-06

GELLRICH, BERNHARD

Executed: 2007-08-06

KUGLER, JENS

Executed: 2007-08-06

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

An Optical Imaging Device and Optical Imaging Method with Adjustment Device for Reducing Dynamic Fluctuations in the Pressure Difference

Application: 14/924,147 →

Publication: US 2016/0147159

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.