Patent Assignment
Reel/Frame 042197/0690
Modifying Conversion
Recorded: 2017-04-10
Pages: 6
Assignor
CARL ZEISS SMT AG
Executed: 2010-10-14
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
An Optical Imaging Device and Optical Imaging Method with Adjustment Device for Reducing Dynamic Fluctuations in the Pressure Difference
Application:
14/924,147 →
Publication:
US 2016/0147159
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.