Patent Assignment
Reel/Frame 037191/0883
Assignment of Assignor's Interest
Recorded: 2015-12-02
Pages: 6
Assignors
PANDEV, STILIAN IVANOV
Executed: 2015-11-17
SANKO, DZMITRY
Executed: 2015-11-24
LU, WEI
Executed: 2015-11-05
SRIVASTAVA, SIDDHARTH
Executed: 2015-11-10
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Signal Response Metrology for Image Based and Scatterometry Overlay Measurements