Patent Assignment
Reel/Frame 037192/0160
Assignment of Assignor's Interest
Recorded: 2015-12-02
Pages: 4
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Achieving a Small Pattern Placement Error in Metrology Targets
Patent:
10,228,320 →
Application:
14/820,917 →