Patent Assignment
Reel/Frame 037192/0164
Assignment of Assignor's Interest
Recorded: 2015-12-02
Pages: 4
Assignors
PANDEV, STILIAN IVANOV
Executed: 2015-10-09
SANKO, DZMITRY
Executed: 2015-11-24
KUZNETSOV, ALEXANDER
Executed: 2015-10-12
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Metrology Of Multiple Patterning Processes