Patent Assignment
Reel/Frame 037215/0209
Assignment of Assignor's Interest
Recorded: 2015-12-04
Pages: 4
Assignors
URANO, HIROYUKI
Executed: 2015-11-11
IIO, MASASHI
Executed: 2015-11-11
TAKEMURA, KATSUYA
Executed: 2015-11-11
MIYAZAKI, TAKASHI
Executed: 2015-11-11
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYA, JAPAN
Covered Property
(1)
Silicone Skeleton-Containing Polymer Compound, Chemically Amplified Negative Resist Composition, Photo-Curable Dry Film and Method for Producing Same, Patterning Process, Layered Product, Substrate, and Semiconductor Apparatus