Patent Assignment
Reel/Frame 037247/0814
Assignment of Assignor's Interest
Recorded: 2015-12-09
Pages: 2
Assignor
GOTTSCHO, RICHARD ALAN
Executed: 2015-12-08
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Estimation of Lifetime Remaining for a Consumable-Part in a Semiconductor Manufacturing Chamber