Patent Assignment
Reel/Frame 037252/0159
Assignment of Assignor's Interest
Recorded: 2015-12-09
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538-6470
Covered Property
(1)
Edge-Clamped and Mechanically Fastened Inner Electrode of Showerhead Electrode Assembly