Patent Assignment
Reel/Frame 037254/0480
Assignment of Assignor's Interest
Recorded: 2015-12-04
Pages: 26
Assignors
SERSHEN, MICHAEL J.
Executed: 2011-12-19
SUNDARAM, GANESH M.
Executed: 2011-12-22
COUTU, ROGER R.
Executed: 2012-02-22
BECKER, JILL S.
Executed: 2011-12-07
DALBERTH, MARK J.
Executed: 2012-02-17
Assignee
CAMBRIDGE NANOTECH, INC.
ONE KENDALL SQUARE, SUITE B7301, CAMBRIDGE, MASSACHUSETTS, 02139
Covered Properties
(2)
Method for High-Velocity and Atmospheric-Pressure Atomic Layer Deposition with Substrate and Coating Head Separation Distance in the Millimeter Range
Atomic Layer Deposition Head
Related Assignments
(3)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Dec 4, 2015
From: CAMBRIDGE NANOTECH, INC.
To: SURTEK, INC.
Reel/Frame 037213/0197 →
Merger
Dec 4, 2015
From: SURTEK, INC.
To: ULTRATECH, INC.
Reel/Frame 037213/0348 →
Assignment of Assignor's Interest
Dec 30, 2019
From: ULTRATECH, INC.
To: VEECO INSTRUMENTS INC.
Reel/Frame 051446/0476 →