Patent Assignment
Reel/Frame 037282/0283
Assignment of Assignor's Interest
Recorded: 2015-12-14
Pages: 4
Assignor
ISHIBASHI, TOMOATSU
Executed: 2015-11-11
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Roll-Type Processing Member, Pencil-Type Processing Member, and Substrate Processing Apparatus Including Any One of These