Patent Assignment
Reel/Frame 037292/0473
Assignment of Assignor's Interest
Recorded: 2015-12-15
Pages: 3
Assignor
IKEDA, TARO
Executed: 2015-12-08
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus with Shower Plate Having Protrusion for Suppressing Film Formation in Gas Holes of Shower Plate